JPH07225Y2 - クリーンユニット - Google Patents

クリーンユニット

Info

Publication number
JPH07225Y2
JPH07225Y2 JP1988094679U JP9467988U JPH07225Y2 JP H07225 Y2 JPH07225 Y2 JP H07225Y2 JP 1988094679 U JP1988094679 U JP 1988094679U JP 9467988 U JP9467988 U JP 9467988U JP H07225 Y2 JPH07225 Y2 JP H07225Y2
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
clean unit
manufacturing apparatus
clean
back wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988094679U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217286U (en]
Inventor
祐司 足利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP1988094679U priority Critical patent/JPH07225Y2/ja
Publication of JPH0217286U publication Critical patent/JPH0217286U/ja
Application granted granted Critical
Publication of JPH07225Y2 publication Critical patent/JPH07225Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Ventilation (AREA)
JP1988094679U 1988-07-18 1988-07-18 クリーンユニット Expired - Lifetime JPH07225Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988094679U JPH07225Y2 (ja) 1988-07-18 1988-07-18 クリーンユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988094679U JPH07225Y2 (ja) 1988-07-18 1988-07-18 クリーンユニット

Publications (2)

Publication Number Publication Date
JPH0217286U JPH0217286U (en]) 1990-02-05
JPH07225Y2 true JPH07225Y2 (ja) 1995-01-11

Family

ID=31319246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988094679U Expired - Lifetime JPH07225Y2 (ja) 1988-07-18 1988-07-18 クリーンユニット

Country Status (1)

Country Link
JP (1) JPH07225Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2512775Y2 (ja) * 1990-01-18 1996-10-02 忠弘 大見 クリ―ンル―ムの気流路構造

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613345U (ja) * 1984-06-14 1986-01-10 日本バイリーン株式会社 空気清浄装置

Also Published As

Publication number Publication date
JPH0217286U (en]) 1990-02-05

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